Electrostatic pull-in application in flexible devices: A review

• Teng Cai,
• Yuming Fang,
• Yingli Fang,
• Ruozhou Li,
• Ying Yu and
• Mingyang Huang

Beilstein J. Nanotechnol. 2022, 13, 390–403, doi:10.3762/bjnano.13.32

• development of new materials and microelectromechanical and nanoelectromechanical systems (MEMS/NEMS), MEMS devices have become an essential part of flexible electronic systems. Common flexible MEMS devices are based on electrostatic, piezoelectric, and thermal actuation. Electrostatic actuation is one of the

Electrostatically actuated encased cantilevers

• Benoit X. E. Desbiolles,
• Gabriela Furlan,
• Adam M. Schwartzberg,
• Paul D. Ashby and
• Dominik Ziegler

Beilstein J. Nanotechnol. 2018, 9, 1381–1389, doi:10.3762/bjnano.9.130

• immersed in a viscous fluid. Quantitative measurements of stiffness, energy dissipation and tip–sample interactions using dynamic force sensors remain challenging due to spurious resonances of the system. Results: We demonstrate for the first time electrostatic actuation with a built-in electrode. Solely

• capacitor model to describe the electrostatic actuation. The predicted deflection and amplitudes match experimental results within a few percent. Consequently, target amplitudes can be set by the drive voltage without requiring calibration of optical lever sensitivity. Furthermore, the excitation bandwidth

• outperforms most other excitation methods. Conclusion: Compatible with any instrument using optical beam deflection detection electrostatic actuation in encased cantilevers combines ultra-low force noise with clean and stable excitation well-suited for quantitative measurements in liquid, compatible with air

Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions

• Liga Jasulaneca,
• Jelena Kosmaca,
• Raimonds Meija,
• Jana Andzane and
• Donats Erts

Beilstein J. Nanotechnol. 2018, 9, 271–300, doi:10.3762/bjnano.9.29

• commercial applications. Actuation of NEM switches includes a variety of methods, for example, electrostatic [7][12], thermal [64], piezoelectric [65], resonant [66] and free-floating [67] switching. Electrostatic actuation is one of the most widespread and actively studied actuation modes. It is a promising

Influence of spurious resonances on the interaction force in dynamic AFM

• Luca Costa and
• Mario S. Rodrigues

Beilstein J. Nanotechnol. 2015, 6, 420–427, doi:10.3762/bjnano.6.42

• electrostatic actuation of the tip. Figure 2a shows the resonance of the excited cantilever in air (black) and in deionized water (blue). The cantilevers have a nominal spring constant of 0.8 N/m. Figure 2b shows the resonance of the cantilever in liquid with direct excitation (blue) and with a conventional

Kelvin probe force microscopy in liquid using electrochemical force microscopy

• Liam Collins,
• Stephen Jesse,
• Jason I. Kilpatrick,
• Alexander Tselev,
• M. Baris Okatan,
• Sergei V. Kalinin and
• Brian J. Rodriguez

Beilstein J. Nanotechnol. 2015, 6, 201–214, doi:10.3762/bjnano.6.19

• electrolyte concentration remains nearly uniform, and thus, the bulk electrolyte acts as a resistor in series with the double layer capacitors at each interface. Equivalent circuit models are commonly used in electrochemical measurements, and reportedly describe the electrostatic actuation of

Size-dependent characteristics of electrostatically actuated fluid-conveying carbon nanotubes based on modified couple stress theory

• Mir Masoud Seyyed Fakhrabadi,
• Abbas Rastgoo and
• Mohammad Taghi Ahmadian

Beilstein J. Nanotechnol. 2013, 4, 771–780, doi:10.3762/bjnano.4.88

• ); electrostatic actuation; fluid flow; modified couple stress theory; Introduction Nanotechnology can be defined as the science of manipulating materials on an atomic or molecular scale [1]. Hence, it generally deals with investigating different aspects of the materials in atomic and molecular dimensions, which

• to study the manipulation of CNTs by using electrostatic actuation and vdW interactions. The results revealed that the vdW force played an important role in the deflection and pull-in behaviors of the CNTs. In electrostatic actuation, a voltage is applied to two electrodes with a gap in-between. In

• the pull-in voltage and is to be discussed in detail in the following sections. In another paper, Dequesnes et al. [15] studied the static pull-in behaviors of the CNTs as well as their natural frequencies under electrostatic actuation, and the vdW interactions and compared some of the results with